Handbook of Micro and Nano Tribology P10
Analysis of Indentation Data
Hardness • Modulus of Elasticity • Determination of Load Frame Compliance and Indenter Area Function • Hardness/Modulus2 Parameter • Continuous Stiffness Measurement • Modulus of Elasticity by Cantilever Deflection Measurement • Determination of Hardness and Modulus of Elasticity of Thin Films from the Composity Response of Film and Substrate